| Device Assembly & Processing (122) |
Allied Multi-prep Lapping and Polishing system |
Available |
Sample Preparation |
| Device Assembly & Processing (122) |
Dicing Saws- ADT |
Available |
Dicing/Bonding |
| Device Assembly & Processing (122) |
Electronic Measurement, Lakeshore 7507 |
Available |
Metrology |
| Device Assembly & Processing (122) |
Ellipsometer, J.A. Woolam |
Available |
Metrology, Surface Analysis... |
| Device Assembly & Processing (122) |
K&S 4700 Wedge Bonder (Staff Run) |
Available |
Dicing/Bonding |
| Device Assembly & Processing (122) |
RTA, SSI Solaris 150 |
Available |
Hot Processing |
| Device Assembly & Processing (122) |
Struers Tegramin 30 Polisher |
Available |
Sample Preparation |
| Dual-Beam Fib (132) |
FIB/SEM - FEI Helios G4 PFIB CXe dual beam |
Available |
Electron Microscopy/Microan... |
| FE Sem (134) |
SEM - FEI Nova 430 w/EDS & CL |
Available |
Electron Microscopy/Microan... |
| General Char (131) |
Versa software workstation |
Available |
X-Ray Analysis/Characteriza... |
| General Char (131) |
Xnovo software workstation |
Available |
X-Ray Analysis/Characteriza... |
| General Char (131) |
ZEISS Versa 620 XRM |
Available |
X-Ray Analysis/Characteriza... |
| Microscopy Sample Prep (125) |
4 Point Probe Station |
Available |
Metrology |
| Microscopy Sample Prep (125) |
K&S 4124 Ball Bonder, Gold Ball |
Available |
Dicing/Bonding |
| Microscopy Sample Prep (125) |
Profilometer, Tencor AS500 |
Available |
Metrology |
| Microscopy Sample Prep (125) |
SCS Parylene Coater |
Available |
Film Deposition |
| SPM (137) |
Horiba microRaman |
Available |
Metrology, Spectroscopy |
| SPM (137) |
S/TEM - FEI Themis Z |
Available |
Electron Microscopy/Microan... |
| Advanced Manufacturing Lab (235) |
Objet 3D Printer |
Available |
3D Printing |
| Advanced Manufacturing Lab (235) |
PDMS Process Tools - Room 235 |
Available |
Other |
| Advanced Manufacturing Lab (235) |
PDMS-Spinner |
Down |
Other |
| Cleanroom, Bio/Nano Bio Processing (163) |
Flexus 2320 |
Available |
Metrology |
| Cleanroom, Bio/Nano Bio Processing (163) |
Nikon LV100 Microscope |
Available |
Metrology |
| Cleanroom, Bio/Nano Bio Processing (163) |
Photospectrometer, Filmetrics F40 |
Available |
Metrology |
| Cleanroom, Bio/Nano Bio Processing (163) |
RIE - Unaxis 790 RIE |
Available |
Plasma |
| Cleanroom, Dry Etch (162) |
Asher - Anatech Barrel SCE600 |
Available |
Plasma |
| Cleanroom, Dry Etch (162) |
Asher - Tepla M4L |
Available |
Plasma |
| Cleanroom, Dry Etch (162) |
DRIE - Deep RIE, STS |
Available |
Plasma |
| Cleanroom, Dry Etch (162) |
DRIE - Oxford Plasma Pro |
Available |
Plasma |
| Cleanroom, Dry Etch (162) |
Profilometer, Dektak 150 |
Available |
Metrology |
| Cleanroom, Dry Etch (162) |
RIE/ICP - Trion |
Available |
Plasma |
| Cleanroom, Dry Etch (162) |
RIE/ICP - Unaxis SLR |
Available |
Plasma |
| Cleanroom, E Beam (161) |
Litho Process BSC-100 Spinner |
Available |
Photolithography |
| Cleanroom, E Beam (161) |
Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven |
Available |
Photolithography |
| Cleanroom, E Beam (161) |
Litho Process Suss Delta 20 & Hot Plate |
Available |
Photolithography |
| Cleanroom, E Beam (161) |
Raith 150, e-beam lithography |
Available |
Photolithography |
| Cleanroom, E Beam (161) |
SEM - JEOL 5700 |
Available |
Metrology |
| Cleanroom, Film Deposition (164) |
ALD - Cambridge Nano Fiji 200 |
Available |
Film Deposition |
| Cleanroom, Film Deposition (164) |
E-beam evaporator, PVD |
Available |
Film Deposition |
| Cleanroom, Film Deposition (164) |
PECVD - STS 310PC SiO2 - SiN - Amorphous Si |
Available |
Film Deposition |
| Cleanroom, Film Deposition (164) |
PECVD - Unaxis 790 PECVD |
Available |
Film Deposition |
| Cleanroom, Film Deposition (164) |
Sputter Deposition, Evatec Clusterline 200 |
Available |
Film Deposition |
| Cleanroom, Film Deposition (164) |
Sputter Deposition, KJL CMS-18 Multi-Source |
Available |
Film Deposition |
| Cleanroom, Hot Processing (166) |
Amerimade Bench BOE/HF |
Available |
Wet Processing |
| Cleanroom, Hot Processing (166) |
Amerimade Bench SC1/SC2 |
Available |
Wet Processing |
| Cleanroom, Hot Processing (166) |
Furnace Tube, Thermcraft, General Hot Process |
Available |
Hot Processing |
| Cleanroom, Hot Processing (166) |
Furnace Tube, Tystar #1 Wet and dry Ox |
Available |
Hot Processing |
| Cleanroom, Hot Processing (166) |
RTA, Steag 100CS RTP |
Available |
Hot Processing |
| Cleanroom, Hot Processing (166) |
Sputter Deposition, AJA - STAFF ONLY |
Available |
Film Deposition |
| Cleanroom, Hot Processing (166) |
Wafer Bonder, EVG 501 |
Available |
Dicing/Bonding |
| Cleanroom, Photolithography (165) |
Heidelberg Laser Writer |
In Use |
Photolithography |
| Cleanroom, Photolithography (165) |
Litho Process EVG Model 620 w/BSA |
Available |
Photolithography |
| Cleanroom, Photolithography (165) |
Litho Process Karl Suss MA6 |
Available |
Photolithography |
| Cleanroom, Photolithography (165) |
Litho Process Laurell Litho Bay & Hot Plate/Oven |
Available |
Photolithography |
| Cleanroom, Photolithography (165) |
Litho Process Suss Delta 80 & Hot Plate/Oven |
Available |
Photolithography |
| Cleanroom, Photolithography (165) |
Oven, YES, Image Reversal/HMDS |
Available |
Photolithography |
| Cleanroom, Photolithography (165) |
Zeiss Microscope |
Available |
Metrology |
| Cleanroom, Wet Processing (167) |
Critical Point Dryer |
Available |
Wet Processing |
| Cleanroom, Wet Processing (167) |
General Acids/Bases Bench-Left |
Available |
Wet Processing |
| Cleanroom, Wet Processing (167) |
JST Wet Bench |
Available |
Wet Processing |
| Cleanroom, Wet Processing (167) |
Solvent Bench #1 Lift Off |
Available |
Wet Processing |
| Cleanroom, Wet Processing (167) |
Solvent Bench #1 PR Strip |
Available |
Wet Processing |
| Cleanroom, Wet Processing (167) |
Solvent Bench 2 - hot plate and workspace |
Up |
Wet Processing |
| Cleanroom, Wet Processing (167) |
Spin Dryer - Sitek |
Available |
Wet Processing |
| EPMA Lab (285) |
Cameca SX Five FE EPMA |
Available |
Electron Microscopy/Microan... |
| EPMA Lab (285) |
SEM - Tescan MIRA3 |
Available |
Electron Microscopy/Microan... |
| FIB Room (136) |
S/TEM - FEI Talos F200i |
Available |
Electron Microscopy/Microan... |
| Lab (283) |
Bruker Optical Profilometer |
Available |
Metrology, Surface Analysis... |
| Lab (283) |
SPM/AFM Dimension 3100 |
Available |
Surface Analysis/Characteri... |
| Lab (283) |
XRay Software Remote Workstation |
Up |
X-Ray Analysis/Characteriza... |
| Nano-CT Room (128) |
Nano-CT - GE v|tome|x m 240 |
In Use |
X-Ray Analysis/Characteriza... |
| Nano-CT Room (128) |
Nano-CT Image Processing/Reconstruction System |
Available |
X-Ray Analysis/Characteriza... |
| Particle Analysis 1 (222) |
Amira - Tomography Software |
Up |
X-Ray Analysis/Characteriza... |
| Particle Analysis 1 (222) |
Autosorb iQ - Analysis (Ar, CO2, He) |
Down |
Porosimetry/Porometry/Surfa... |
| Particle Analysis 1 (222) |
Autosorb iQ - Krypton |
Available |
Porosimetry/Porometry/Surfa... |
| Particle Analysis 1 (222) |
Autosorb iQ - Outgassing (monitor) |
Available |
Porosimetry/Porometry/Surfa... |
| Particle Analysis 1 (222) |
FTIR/FTIR Microscope - ThermoFisher iS50 |
Available |
Spectroscopy |
| Particle Analysis 1 (222) |
Quantachrome Porometer 3g zh |
Available |
Porosimetry/Porometry/Surfa... |
| Particle Analysis 1 (222) |
Quantachrome Ultrapyc 1000 Gas Pycnometer |
Down |
Porosimetry/Porometry/Surfa... |
| Particle Analysis 1 (222) |
Rheometer - ARES LS1 |
Available |
Other Analytical Techniques |
| Particle Analysis 2 (224) |
Labconco Triad Freeze Dryer |
Available |
Sample Preparation |
| Particle Analysis 2 (224) |
Paar Physica Electro Kinetic Analyzer |
Down |
Particle Analysis/Character... |
| Particle Analysis 2 (224) |
TSI PSD 3603 (Aerosizer) |
Available |
Particle Analysis/Character... |
| Particle Analysis 3 (228) |
Coater - Carbon |
Available |
Sample Preparation |
| Particle Analysis 3 (228) |
Coater - Hummer V Au-Pd |
Down |
Sample Preparation |
| Particle Analysis 3 (228) |
Coater - SPI Au-Pd |
Available |
Sample Preparation |
| Particle Analysis 3 (228) |
SEM - Hitachi S-3000 |
Available |
Electron Microscopy/Microan... |
| Particle Analysis 4 (239) |
Coulter LS13320 |
Available |
Particle Analysis/Character... |
| Particle Analysis 4 (239) |
Malvern Zetasizer Ultra |
Available |
Particle Analysis/Character... |
| Particle Analysis 4 (239) |
Quantachrome PoreMaster Mercury Porosimeter |
Down |
Porosimetry/Porometry/Surfa... |
| Particle Analysis 4 (239) |
UV/Vis - Perkin-Elmer Lambda 800 |
Available |
Spectroscopy |
| Room (8B) |
S/TEM - FEI Tecnai F20 |
Available |
Electron Microscopy/Microan... |
| Room (8E) |
EDAX EDS/EBSD on FEI Helios NanoLab 600i dual beam |
Available |
Electron Microscopy/Microan... |
| Room (8E) |
FIB/SEM - FEI Helios NanoLab 600i dual beam |
Available |
Electron Microscopy/Microan... |
| Surface Analysis Lab (248) |
Perkin-Elmer PHI 660 - AES |
Down |
Surface Analysis/Characteri... |
| Surface Analysis Lab (248) |
XPS - ULVAC-PHI XPS |
Available |
Surface Analysis/Characteri... |
| X-Ray Diffraction Lab (233) |
Panalytical XPert MRD |
Down |
X-Ray Analysis/Characteriza... |
| X-Ray Diffraction Lab (233) |
Panalytical XPert Powder |
Available |
X-Ray Analysis/Characteriza... |
| X-Ray Diffraction Lab (233) |
XRD Software Workstation |
Available |
X-Ray Analysis/Characteriza... |