E-beam evaporator, PVD - Status: Available
General Information
- Current Status:
- Available
- Use Rates:
- External Academic & Government:
- $76.50/Hour
- External Affiliated Commercial/Industrial:
- $76.50/Hour
- External Commercial/Industrial:
- $102.00/Hour
- External International Academic:
- $102.00/Hour
- Internal Standard:
- $51.00/Hour
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- In Cleanroom:
- Yes
- Main Contact:
- Stuart Ding
Description
4 pocket 15cc e-beam,
one 3" DC sputter source,
substrate heater
Reservations are required and must be made 24 hrs in advance.
Capabilities
4 pocket 15cc e-beam,
one 3" DC sputter source,
substrate heater
Reservations are required and must be made 24 hrs in advance with the earliest being 10AM. Materials and thickness requests must be stated in the reservation so that the routine can be written and ready for your run.
Available E-beam Consumables: - User Owned, Ag, Al, Au, Co - Cobalt, Cr, Cu, Ge, Ir, Mo, Ni, Pd, Si - undoped, Ta, Ti, W (Staff-only, no photoresist)
An active Gatorlink login is required to create a new reservation.
