Cleanroom, Bio/Nano Bio Processing (163) Reservation Calendar

Equipment in Room: Filmetrics, Flexus 2320, Nikon LV100 Microscope, PVD e-beam, Wenesco Hotplate, RIE - Unaxis 790 RIE

Reservation buffers in effect for this room: PVD e-beam: 24 minutes, RIE - Unaxis 790 RIE: 30 minutes. Note: When calculating room occupancy, reservation buffers will effectively extend a reservation by the buffer amount.