Equipment Rates
Usage rates are displayed below. For staff assistance, add $50/hr for internal rates, or $55/hr for external rates. Rates are per hour unless otherwise noted. Download Rates to CSV file
Rate Classes
- Internal - University of Florida accounts
- Ext. Acad/Gov - Non-UF Academic or Government
- Ext. Intl. Acad - Non-UF International Academic
- Ext. Affiliated - Affiliated Commercial/Industrial (25% discount for member companies)
- External - Commercial/Industrial
FY2027 Rate Listing
Filter by:
| Name | Type | Internal | Ext. Acad / Gov | Ext. Intl. Acad | Ext. Affiliated | External | Notes |
|---|---|---|---|---|---|---|---|
| 4 Point Probe Station | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | Customer use only |
| ALD - Cambridge Nano Fiji 200 | Fabrication | $98.70 | $148.00 | $197.30 | $148.00 | $197.00 | Rates are per run. (Max run 24 hrs) |
| ALD - Veeco Fiji 200 | Fabrication | $98.70 | $148.00 | $197.30 | $148.00 | $197.00 | Rates are per run. (Max run 24 hrs) |
| Allied Multi-prep Lapping and Polishing system | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | Users must purchase their own consumables for this equipment. |
| Amerimade Bench BOE/HF | Fabrication | $26.60 | $39.90 | $53.10 | $40.00 | $53.00 | $35 charge for bath refills |
| Amerimade Bench SC1/SC2 | Fabrication | $26.60 | $39.90 | $53.10 | $40.00 | $53.00 | $35 surcharge per use |
| Amira - Tomography Software | Characterization | $7.90 | $11.90 | $15.90 | $40.00 | $53.00 | |
| Asher - Anatech Barrel SCE600 | Fabrication | $47.80 | $71.70 | $95.60 | $72.00 | $96.00 | |
| Asher - Tepla M4L | Fabrication | $47.80 | $71.70 | $95.60 | $72.00 | $96.00 | |
| Autosorb iQ - Analysis (Ar, CO2, He) | Characterization | $2.20 | $3.20 | $4.30 | $13.00 | $17.00 | |
| Autosorb iQ - Krypton | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Autosorb iQ - Outgassing (monitor) | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Bruker Optical Profilometer | Characterization | $26.60 | $39.90 | $53.10 | $41.00 | $55.00 | |
| Cameca SX Five FE EPMA | Characterization | $55.20 | $82.80 | $110.40 | $167.00 | $223.00 | Published rates are for first 8 hours. Rate then decreases to $13.80/hr. for Internal, $20.60/hr. for Ext. Acad/Gov, $27.60/hr. Ext. Intl. Acad, $41.20/hr. for Ext. Affiliated, $55.11/hr. for External. Runs not to exceed 24 hours in total. |
| Coater - Carbon | Characterization | $16.50 | $24.70 | $33.00 | $33.00 | $45.00 | Staff run only |
| Coater - Hummer V Au-Pd | Characterization | $16.50 | $24.70 | $33.00 | $33.00 | $45.00 | Staff run only |
| Coater - SPI Au-Pd | Characterization | $16.50 | $24.70 | $33.00 | $33.00 | $45.00 | Staff run only |
| Coulter LS13320 | Characterization | $38.20 | $57.30 | $76.40 | $140.00 | $187.00 | |
| Critical Point Dryer | Fabrication | $65.80 | $98.70 | $131.60 | $99.00 | $132.00 | Rates are per run. $20 surcharge per use |
| Dicing Saws- ADT | Fabrication | $44.00 | $66.00 | $88.00 | $66.00 | $88.00 | |
| DRIE - Deep RIE, STS | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| DRIE - Oxford Plasma Pro | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| E-beam evaporator, PVD | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| Electronic Measurement, Lakeshore 7507 | Fabrication | $22.20 | $33.40 | $44.50 | $33.00 | $44.00 | |
| Ellipsometer, J.A. Woolam | Characterization | $22.20 | $33.40 | $44.50 | $33.00 | $45.00 | |
| FIB/SEM - FEI Helios G4 PFIB CXe dual beam | Characterization | $71.10 | $106.60 | $142.10 | $205.00 | $274.00 | Published rates are for first 8 hours. Rate then decreases to $17.80/hr. for Internal, $26.70/hr. for Ext. Acad/Gov, $35.50/hr. Ext. Intl. Acad, $53.30/hr. for Ext. Affiliated, $71.10/hr. for External. Runs not to exceed 24 hours in total. |
| FIB/SEM - FEI Helios NanoLab 600i dual beam | Characterization | $71.10 | $106.60 | $142.10 | $205.00 | $274.00 | |
| FIB/SEM - Thermo Fisher Scios 2 dual beam | Characterization | $71.10 | $106.60 | $142.10 | $205.00 | $274.00 | |
| Flexus 2320 | Fabrication | $22.20 | $33.40 | $44.50 | $33.00 | $44.00 | |
| FTIR/FTIR Microscope - ThermoFisher iS50 | Characterization | $55.20 | $82.80 | $110.40 | $164.00 | $219.00 | |
| Furnace Tube, Thermcraft, General Hot Process | Fabrication | $11.10 | $16.70 | $22.20 | $17.00 | $22.00 | |
| Furnace Tube, Tystar #1 Wet and dry Ox | Fabrication | $26.60 | $39.90 | $53.10 | $40.00 | $53.00 | Staff run only |
| General Acids/Bases Bench-Left | Fabrication | $26.60 | $39.90 | $53.10 | $40.00 | $53.00 | |
| Heidelberg Laser Writer | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | $515 Cap for long exposure (8+ hours) by staff per single mask (Only UF PIs) |
| Horiba microRaman | Characterization | $48.30 | $72.50 | $96.60 | $164.00 | $219.00 | |
| JST Wet Bench | Fabrication | $26.60 | $39.90 | $53.10 | $40.00 | $53.00 | |
| K&S 4124 Ball Bonder, Gold Ball | Fabrication | $30.80 | $46.20 | $61.60 | $46.00 | $62.00 | |
| K&S 4700 Wedge Bonder (Staff Run) | Fabrication | $30.80 | $46.20 | $61.60 | $46.00 | $62.00 | |
| Labconco Triad Freeze Dryer | Characterization | $32.90 | $49.30 | $65.70 | $49.00 | $66.00 | Rates are per day |
| Litho Process BSC-100 Spinner | Fabrication | $35.00 | $52.50 | $70.00 | $53.00 | $70.00 | |
| Litho Process EVG Model 620 w/BSA | Fabrication | $48.30 | $72.50 | $96.60 | $72.00 | $97.00 | |
| Litho Process Karl Suss MA6 | Fabrication | $48.30 | $72.50 | $96.60 | $72.00 | $97.00 | |
| Litho Process Laurell Litho Bay & Hot Plate/Oven | Fabrication | $35.00 | $52.50 | $70.00 | $53.00 | $70.00 | |
| Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven | Fabrication | $35.00 | $52.50 | $70.00 | $53.00 | $70.00 | |
| Litho Process Suss Delta 20 & Hot Plate | Fabrication | $48.30 | $72.50 | $96.60 | $72.00 | $97.00 | |
| Litho Process Suss Delta 80 & Hot Plate/Oven | Fabrication | $48.30 | $72.50 | $96.60 | $72.00 | $97.00 | |
| Malvern Zetasizer Ultra | Characterization | $38.20 | $57.30 | $76.40 | $140.00 | $187.00 | |
| Nano-CT - GE v|tome|x m 240 | Characterization | $38.20 | $57.30 | $76.40 | $247.00 | $329.00 | Rates are for first 3 hours. Additional hours (up to 12 hours) for each rate class are: $9.53/hr, $14.32/hr, $19.06/hr, $61.70/hr, and $82.19/hr |
| Nano-CT Image Processing/Reconstruction System | Characterization | $8.40 | $12.70 | $16.90 | $41.00 | $55.00 | |
| Nikon LV100 Microscope | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Customer use only |
| NRF Cleanroom | Fabrication | $19.10 | $28.60 | $38.10 | $29.00 | $38.00 | Rates are per day |
| Objet 3D Printer | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | Service work only |
| Oven, YES, Image Reversal/HMDS | Fabrication | $17.50 | $26.30 | $35.00 | $26.00 | $35.00 | |
| Panalytical XPert MRD | Characterization | $27.60 | $41.40 | $55.20 | $167.00 | $223.00 | Published rates are for first 3 hours. Rate then decreases to $6.90/hr. for Internal, $10.30/hr. for Ext. Acad/Gov, $13.80/hr. Ext. Intl. Acad, $20.60/hr. for Ext. Affiliated, $27.55/hr. for External. Runs not to exceed 12 hours in total. |
| Panalytical XPert Powder | Characterization | $27.60 | $41.40 | $55.20 | $164.00 | $219.00 | |
| PDMS Process Tools - Room 235 | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | |
| PDMS-Spinner | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | |
| PECVD - STS 310PC SiO2 - SiN - Amorphous Si | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| PECVD - Unaxis 790 PECVD | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| Perkin-Elmer PHI 660 - AES | Characterization | $38.20 | $57.30 | $76.40 | $164.00 | $219.00 | |
| Photospectrometer, Filmetrics F40 | Fabrication | $22.20 | $33.40 | $44.50 | $33.00 | $44.00 | |
| Profilometer, Dektak XT | Fabrication | $48.30 | $72.50 | $96.60 | $72.00 | $97.00 | |
| Profilometer, Tencor AS500 | Characterization | $22.20 | $33.40 | $44.50 | $33.00 | $45.00 | |
| Quantachrome PoreMaster Mercury Porosimeter | Characterization | $54.60 | $81.90 | $109.20 | $140.00 | $187.00 | |
| Quantachrome Porometer 3g zh | Characterization | $38.20 | $57.30 | $76.40 | $57.00 | $76.00 | |
| Raith 150, e-beam lithography | Fabrication | $32.90 | $49.30 | $65.70 | $49.00 | $66.00 | Staff run only |
| Rheometer - ARES LS1 | Characterization | $11.10 | $16.70 | $22.20 | $49.00 | $66.00 | |
| RIE - Unaxis 790 RIE | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| RIE/ICP - Trion | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| RIE/ICP - Unaxis SLR | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| RTA, SSI Solaris 150 | Fabrication | $48.30 | $72.50 | $96.60 | $72.00 | $97.00 | |
| RTA, Steag 100CS RTP | Fabrication | $48.30 | $72.50 | $96.60 | $72.00 | $97.00 | |
| S/TEM - FEI Talos F200i | Characterization | $76.40 | $114.60 | $152.90 | $199.00 | $265.00 | |
| S/TEM - FEI Tecnai F20 | Characterization | $76.40 | $114.60 | $152.90 | $199.00 | $265.00 | |
| S/TEM - FEI Themis Z | Characterization | $84.90 | $127.30 | $169.70 | $239.00 | $318.00 | |
| SCS Parylene Coater | Fabrication | $27.60 | $41.40 | $55.20 | $41.00 | $55.00 | Rates are per run |
| SEM - FEI Nova 430 w/EDS & CL | Characterization | $65.80 | $98.70 | $131.60 | $167.00 | $223.00 | |
| SEM - Hitachi S-3000 | Characterization | $38.20 | $57.30 | $76.40 | $123.00 | $164.00 | |
| SEM - JEOL 5700 | Fabrication | $48.30 | $72.50 | $96.60 | $72.00 | $97.00 | |
| SEM - Tescan MIRA3 | Characterization | $65.80 | $98.70 | $131.60 | $167.00 | $223.00 | Published rates are for first 8 hours. Rate then decreases to $16.48/hr. for Internal, $24.67/hr. for Ext. Acad/Gov, $32.86/hr. Ext. Intl. Acad, $49.34/hr. for Ext. Affiliated, $65.77/hr. for External. Runs not to exceed 24 hours in total. |
| Solvent Bench #1 Lift Off | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | |
| Solvent Bench #1 PR Strip | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | |
| Solvent Bench 2 - hot plate and workspace | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | |
| Spin Dryer - Sitek | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | |
| SPM/AFM Dimension 3100 | Characterization | $44.00 | $66.00 | $88.00 | $123.00 | $164.00 | |
| Sputter Deposition, AJA - STAFF ONLY | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| Sputter Deposition, Evatec Clusterline 200 | Fabrication | $106.10 | $159.10 | $212.20 | $159.00 | $212.00 | |
| Sputter Deposition, KJL CMS-18 Multi-Source | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| Sputter Deposition, TFE Batch Vertical PVD | Fabrication | $52.50 | $78.80 | $105.10 | $79.00 | $105.00 | |
| Struers Tegramin 30 Polisher | Fabrication | $1.00 | $1.50 | $2.00 | $2.00 | $2.00 | Customer use only |
| TSI PSD 3603 (Aerosizer) | Characterization | $38.20 | $57.30 | $76.40 | $140.00 | $187.00 | |
| UV/Vis - Perkin-Elmer Lambda 800 | Characterization | $38.20 | $57.30 | $76.40 | $140.00 | $187.00 | |
| Versa software workstation | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Wafer Bonder, EVG 501 | Fabrication | $35.00 | $52.50 | $70.00 | $53.00 | $70.00 | |
| Xnovo software workstation | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| XPS - ULVAC-PHI XPS | Characterization | $65.80 | $98.70 | $131.60 | $205.00 | $274.00 | |
| XRD Software Workstation | Characterization | $8.40 | $12.70 | $16.90 | $41.00 | $55.00 | |
| Zeiss Microscope | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| ZEISS Versa 620 XRM | Characterization | $38.20 | $57.30 | $76.40 | $247.00 | $329.00 | Rates are for first 3 hours. Additional hours (up to 24 hours) for each rate class are: $9.53/hr, $14.32/hr, $19.06/hr, $28.63/hr, and $82/hr |
