4 Point Probe Station - Status: Available
General Information
- Current Status:
- Available
- Use Rates:
- External Academic & Government:
- $0.00/Hour
- External Affiliated Commercial/Industrial:
- $0.00/Hour
- External Commercial/Industrial:
- $0.00/Hour
- External International Academic:
- $0.00/Hour
- Internal Standard:
- $0.00/Hour
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- In Cleanroom:
- No
- Main Contact:
- Marco Downing
Description
The VEECO FPP-5000 4-point probe simplifies the measurement of resistive properties of
semiconductor wafers and resistive films. The microprocessor based electronics permits direct
computation of V/I, sheet or slice resistivity, and metallization thickness and P-N type testing.
Unlike most four point probes and probing stations, which move the probe head into the wafer,
the FPP-5000 is designed so that the wafer is moved into the probe head. This insures constant
probe force independent of operator force and wafer thickness.
Capabilities
The VEECO FPP-5000 4-point probe simplifies the measurement of resistive properties of
semiconductor wafers and resistive films. The microprocessor based electronics permits direct
computation of V/I, sheet or slice resistivity, and metallization thickness and P-N type testing.
Unlike most four point probes and probing stations, which move the probe head into the wafer,
the FPP-5000 is designed so that the wafer is moved into the probe head. This insures constant
probe force independent of operator force and wafer thickness.
There is no cost for training on this instrument but a brief familiarization is required and provided by staff as needed.
Requirements before use
1. To sign up for training go on the NRF website.
2. Check-out platen, wafer holder, and hand held probe at the reception desk.
An active Gatorlink login is required to create a new reservation.
