Litho Process BSC-100 Spinner - Status: Available
General Information
- Current Status:
- Available
- Use Rates:
- External Academic & Government:
- $51.00/Hour
- External Affiliated Commercial/Industrial:
- $51.00/Hour
- External Commercial/Industrial:
- $68.00/Hour
- External International Academic:
- $68.00/Hour
- Internal Standard:
- $34.00/Hour
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- Room:
- Cleanroom, E Beam (161)
- In Cleanroom:
- Yes
- Main Contact:
- David Hays
Description
Description: The BSC-100 Spinner is used to manually apply difficult to clean materials such as SU8, spin on glass, ITO, etc.
The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.
Capabilities
Description: The BSC-100 Spinner is used to manually apply difficult to clean materials such as SU8, spin on glass, ITO, etc.
The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.
Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki link
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