Cleanroom, E Beam (161) Reservation Calendar
Equipment in Room: SEM - JEOL 5700, Litho Process Laurell Spinner E-Beam Bay & Ho, Litho Process, Headway E-Beam Bay & Hot Plate, Raith 150, Litho Process Suss Delta 20 & Hot Plate, Litho Process BSC-100 Spinner, ALD - Veeco
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