Litho Process Headway E-Beam Bay & Hot Plate/Oven - Status: Down

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General Information

Current Status:

Down

Use Rates:

External Academic & Government:

$49.50/Hour

External Affiliated Commercial/Industrial:

$49.50/Hour

External Commercial/Industrial:

$66.00/Hour

External International Academic:

$66.00/Hour

Internal Standard:

$33.00/Hour

Service:

Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.

Building:

NANO (0070)

Room:

Cleanroom, E Beam (161)

In Cleanroom:

Yes

Main Contact:

David Hays

Description

SU8 and other non-standard resist designated spinner.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki link

Capabilities

SU8 designated spinner.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.