Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven - Status: Available

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General Information

Current Status:

Available

Use Rates:

External Academic & Government:

$51.00/Hour

External Affiliated Commercial/Industrial:

$51.00/Hour

External Commercial/Industrial:

$68.00/Hour

External International Academic:

$68.00/Hour

Internal Standard:

$34.00/Hour

Service:

Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.

Building:

NANO (0070)

Room:

Cleanroom, E Beam (161)

In Cleanroom:

Yes

Main Contact:

David Hays

Description

Description: The E-beam Bay Laurell Spinner is used to manually apply PMMA ONLY. NO OTHER MATERIALS MAY BE USED.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Capabilities

Description: The E-beam Bay Laurell Spinner is used to manually apply PMMA ONLY. NO OTHER MATERIALS MAY BE USED.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.