RTA, Steag 100CS RTP - Status: Down
General Information
- Current Status:
- Down
- Use Rates:
- External Academic & Government:
- $70.30/Hour
- External Affiliated Commercial/Industrial:
- $70.30/Hour
- External Commercial/Industrial:
- $93.70/Hour
- External International Academic:
- $93.70/Hour
- Internal Standard:
- $46.90/Hour
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- In Cleanroom:
- Yes
- Main Contact:
- Bill Lewis
Description
Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.
Rapid Thermal Processing wiki link
Microfabrication wiki link
Capabilities
Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.
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