Cameca SX Five FE EPMA - Status: Available

General Information

Current Status:

Available

Use Rates:

External Academic & Government:: $80.30/Hour
External Affiliated Commercial/Industrial:: $162.20/Hour
External Commercial/Industrial:: $216.30/Hour
External International Academic:: $107.10/Hour
Internal Standard:: $53.60/Hour

Service:

Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.

Building:: NANO (0070)
Room:: EPMA Lab (285)
In Cleanroom:: No
Main Contact:: Andres Trucco

Description

Rate Notes: Published rates are for first 8 hours. Rate then decreases to $13.40/hr. for Internal Standard - $20/hr. for External Academic & Gov. - $26.75/hr. External Int. Academic - $40/hr. for External Affiliated Commercial/Industrial - $53.50/hr. for External Commercial/Industrial.

Runs not to exceed 24 hours in total.

Field Emission Electron Probe Micro Analyzer for Quantitative Analysis and X-Ray Mapping with Sub-Micron Spatial Resolution. The SXFiveFE provides:
- Field emission source and SEM with 6nm resolution @ 25-30keV.
- Automation capabilities for-long term unattended analysis.
- Quantitative analysis at submicron scale.
- High quality minor and trace element analysis.
- Mapping at high spartial resolution.
- High precision WDS spectrometers for high reproducibility.
- Detection limits down to 100ppm (0.01%)

Capabilities

SXFiveFE Main Specifications and Configuration:

- Maximum accelerating voltage: 30kV.

- Beam diameter in analytical mode:
- 80nm @ 20kV, 10nA.
- 100nm @ 10kV, 10nA.
- 150nm @ 5KV, 10nA.

- Maximum beam current: 400nA to 600nA

- Beam Stability: +- 0.5% per hour @ 20kV, 20nA.

- Installed detectors: 4 BSEâ€™s, SE and EDS (EDAX Element).

- Installed WDS Spectrometers and configurations:
* SP1: Inclined, less sensitive to specimen height, for mapping rough surface samples. Low pressure with LiF, PET, TAP and PC2 crystals installed.
* SP2: Vertical, high pressure for greater sensitivity, with LLiF and LPET crystals.
* SP3: Vertical, low pressure, with TAP and PC0 crystals.
* SP4: Vertical, low pressure, with LPET and TAP crystals.