Furnace Tube, Tystar #1 Wet and dry Ox - Status: Available

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General Information

Current Status:

Available

Use Rates:

External Academic & Government:

$38.60/Hour

External Affiliated Commercial/Industrial:

$38.60/Hour

External Commercial/Industrial:

$51.50/Hour

External International Academic:

$51.50/Hour

Internal Standard:

$25.80/Hour

Service:

Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.

Building:

NANO (0070)

Room:

Cleanroom, Hot Processing (166)

In Cleanroom:

Yes

Main Contact:

Stuart Ding

Description

IMPORTANT NOTE: All wafers intended for processing in any of the Tystar tubes are to be thoroughly cleaned using the RCA cleaning protocol first!!!

Used for processing up to 50 wafers per batch. Current wafer boats for 3" and 4" wafers. Maximum wafers size is 6".

This is a staff run only resource.

Capabilities

IMPORTANT NOTE: All wafers intended for processing in any of the Tystar tubes are to be thoroughly cleaned using the RCA cleaning protocol first!!!

Used for processing up to 50 wafers per batch. For both Wet/Dry Oxidation up to 1050C.

This is a staff run only resource.