RTA, SSI Solaris 150 - Status: Available
General Information
- Current Status:
- Available
- Use Rates:
- External Academic & Government:
- $70.30/Hour
- External Affiliated Commercial/Industrial:
- $70.30/Hour
- External Commercial/Industrial:
- $93.70/Hour
- External International Academic:
- $93.70/Hour
- Internal Standard:
- $46.90/Hour
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- In Cleanroom:
- No
- Main Contact:
- Andres Trucco
Description
Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.
Capabilities
Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers. Process time is limited to 5 minutes.
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