FIB/SEM - FEI Helios NanoLab 600i dual beam - Status: Available

General Information

Image of FIB/SEM - FEI Helios NanoLab 600i dual beam

Current Status:

Available

Use Rates:

External Academic & Government:: $103.50/Hour
External Affiliated Commercial/Industrial:: $199.30/Hour
External Commercial/Industrial:: $265.70/Hour
External International Academic:: $138.00/Hour
Internal Standard:: $69.00/Hour

Service:

Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.

Building:: NRB (0557)
Room:: Room (8E)
In Cleanroom:: No
Main Contact:: Nicholas Rudawski

Description

The FEI Helios NanoLab 600i DualBeam system integrates focused ion and scanning electron beams for FIB and SEM functionality in one instrument.

Instrument Specifications:

Elstar SEM column; 0.3 - 30 kV operating voltage with <1 nm resolution

Field-free (high-resolution) and immersion (ultrahigh-resolution) SEM modes

Schottky field emission gun electron source

Sidewinder FIB column with 2 - 30 kV operating voltage; 1 pA - 65 nA beam currents

Ga liquid metal ion source

Everhart-Thornley and through lens detectors; configurable for SE+BSE or BSE only imaging

In-situ Pt deposition GIS

Omniprobe AutoProbe 200 in-situ micromanipulator

EDAX Octane Elite (70 mm squared active area) SDD energy dispersive spectroscopy system

EDAX Velocity CMOS EBSD camera

EDAX APEX EDS and EBSD acquisition and analysis software

EDAX OIM 8 texture and crystallographic analysis software

Auto Slice and View serial sectioning software

YouTube video demonstrating what is covered in basic training of the Helios

YouTube video tutorial on use of the Helios to prepare lamellas

Zoom workshop on dual FIB/SEM tips, tricks, and other useful info (recorded 11/19/21)

EDAX webinar: introduction to EBSD

TRAINING REQUIREMENTS:

1. Please create an NRF user account with a PI-approved funding source.

2. Please complete NRF general safety training.

3. Please complete the FIB/SEM Prerequisite Training course through eLearning; submit a training request using the "Training" link at the bottom of the page and follow the instructions to be added to the course; you must complete this course regardless of any prior coursework or operational experience related to SEM or FIB you may have.

4. Users working on radioactive materials must also complete the Radiation Safety Source Course (2.0).

5. Users working on radioactive materials must also obtain a personal dosimeter badge.

Capabilities

High-quality S/TEM lamella preparation via in-situ lift-out method
High-quality cross-section face preparation
High-resolution (<1 nm) top-down and cross-sectional SEM imaging
Nanoscale (<100 nm) to microscale (>1 um) electron and ion beam-assisted milling, patterning, and deposition
Automated serial sectioning and cross-section face imaging
Nanoscale (<100 nm) to microscale (>1 um)compositional analysis using EDS
Nanoscale (<100 nm) to microscale (>1 um) texture and crystallographic analysis using EBSD