Asher - Tepla M4L - Status: Available
General Information
- Current Status:
- Available
- Use Rates:
- External Academic & Government:
- $71.70/Hour
- External Affiliated Commercial/Industrial:
- $72.00/Hour
- External Commercial/Industrial:
- $96.00/Hour
- External International Academic:
- $95.60/Hour
- Internal Standard:
- $47.80/Hour
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- In Cleanroom:
- Yes
- Main Contact:
- Bill Lewis
Description
The MetroLine/IPC M4L Plasma Processing System is a batch-mode plasma system for etch, strip,clean, and surface treatment.
Capabilities
Gases include Oxygen, CF4 and Argon. The M4L generates a low pressure, low temperature gaseous plasma. Up to 600W RF energy is applied to a set of electrodes to separate some of the gas molecules inside the chamber into chemically reactive atoms, ions, and free radicals.
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