Cleanroom, Dry Etch (162) Reservation Calendar
Equipment in Room: Asher - Anatech Barrel SCE600, DRIE - Deep RIE, STS, Profilometer, Dektak 150, RIE/ICP - Trion, RIE/ICP - Unaxis SLR, DRIE - Oxford Plasma Pro, Asher - Tepla M4L
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