Cleanroom, Dry Etch (162) Reservation Calendar

Equipment in Room: Asher - Anatech Barrel SCE600, DRIE - Deep RIE, STS, RIE/ICP - Trion, RIE/ICP - Unaxis SLR, DRIE - Oxford Plasma Pro, Asher - Tepla M4L, Profilometer, Dektak XT

Reservation buffers in effect for this room: RIE/ICP - Unaxis SLR: 30 minutes. Note: When calculating room occupancy, reservation buffers will effectively extend a reservation by the buffer amount.