Asher - Anatech Barrel SCE600 - Status: Available
General Information
- Current Status:
- Available
- Use Rates:
- External Academic & Government:
- $69.50/Hour
- External Affiliated Commercial/Industrial:
- $69.50/Hour
- External Commercial/Industrial:
- $92.70/Hour
- External International Academic:
- $92.70/Hour
- Internal Standard:
- $46.40/Hour
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- In Cleanroom:
- Yes
- Main Contact:
- David Hays
Description
Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.
NOTE: The training only takes 10-15 mins. For training, please select standard training and once it has cleared PI approval, contact a NRF Staff member that is in the cleanroom 8-5 Mon-Fri and they will provide this.
Capabilities
Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.
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