Equipment Rates
Usage rates are displayed below. For staff assistance, add $50/hr for internal rates, or $55/hr for external rates. Rates are per hour unless otherwise noted. Download Rates to CSV file
Rate Classes
- Internal - University of Florida accounts
- Ext. Acad/Gov - Non-UF Academic or Government
- Ext. Intl. Acad - Non-UF International Academic
- Ext. Affiliated - Affiliated Commercial/Industrial (25% discount for member companies)
- External - Commercial/Industrial
FY2026 Rate Listing
Show:
| Name | Type | Internal | Ext. Acad / Gov | Ext. Intl. Acad | Ext. Affiliated | External | Notes |
|---|---|---|---|---|---|---|---|
| Profilometer, Tencor AS500 | Characterization | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| Asher - Anatech Barrel SCE600 | Fabrication | $46.40 | $69.50 | $92.70 | $69.50 | $92.70 | |
| Bruker Optical Profilometer | Characterization | $25.80 | $38.60 | $51.50 | $40.20 | $53.60 | |
| DRIE - Deep RIE, STS | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| Dicing Saws- ADT | Fabrication | $42.70 | $64.10 | $85.50 | $64.10 | $85.50 | |
| SPM/AFM Dimension 3100 | Characterization | $42.70 | $64.10 | $85.50 | $119.70 | $159.70 | |
| Paar Physica Electro Kinetic Analyzer | Characterization | $26.80 | $40.20 | $53.60 | $136.00 | $181.30 | |
| Electronic Measurement, Lakeshore 7507 | Fabrication | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| Ellipsometer, J.A. Woolam | Characterization | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| SEM - FEI Nova 430 w/EDS & CL | Characterization | $63.90 | $95.80 | $127.70 | $162.20 | $216.30 | |
| Photospectrometer, Filmetrics F40 | Fabrication | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| Flexus 2320 | Fabrication | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| FTIR/FTIR Microscope - ThermoFisher iS50 | Characterization | $53.60 | $80.30 | $107.10 | $159.10 | $212.20 | |
| Furnace Tube, Thermcraft, General Hot Process | Fabrication | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| General Acids/Bases Bench-Left | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | |
| Horiba microRaman | Characterization | $46.90 | $70.30 | $93.70 | $159.10 | $212.20 | |
| XRD Software Workstation | Characterization | $8.20 | $12.40 | $16.50 | $40.20 | $53.60 | |
| SEM - JEOL 5700 | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| JST Wet Bench | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | |
| K&S 4124 Ball Bonder, Gold Ball | Fabrication | $29.90 | $44.80 | $59.70 | $44.80 | $59.70 | |
| K&S 4700 Wedge Bonder (Staff Run) | Fabrication | $29.90 | $44.80 | $59.70 | $44.80 | $59.70 | |
| Litho Process EVG Model 620 w/BSA | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Litho Process Karl Suss MA6 | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Litho Process Laurell Litho Bay & Hot Plate/Oven | Fabrication | $34.00 | $51.00 | $68.00 | $51.00 | $68.00 | |
| Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven | Fabrication | $34.00 | $51.00 | $68.00 | $51.00 | $68.00 | |
| Litho Process Suss Delta 80 & Hot Plate/Oven | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Coulter LS13320 | Characterization | $37.10 | $55.60 | $74.20 | $136.00 | $181.30 | |
| Nano-CT Image Processing/Reconstruction System | Characterization | $8.20 | $12.40 | $16.50 | $40.20 | $53.60 | |
| Oven, YES, Image Reversal/HMDS | Fabrication | $17.00 | $25.50 | $34.00 | $25.50 | $34.00 | |
| PECVD - STS 310PC SiO2 - SiN - Amorphous Si | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| Perkin-Elmer PHI 660 - AES | Characterization | $37.10 | $55.60 | $74.20 | $159.10 | $212.20 | |
| Quantachrome PoreMaster Mercury Porosimeter | Characterization | $53.00 | $79.60 | $106.10 | $136.00 | $181.30 | |
| Quantachrome Porometer 3g zh | Characterization | $37.10 | $55.60 | $74.20 | $55.60 | $74.20 | |
| Profilometer, Dektak 150 | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| E-beam evaporator, PVD | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| Quantachrome Ultrapyc 1000 Gas Pycnometer | Characterization | $37.10 | $55.60 | $74.20 | $55.60 | $74.20 | |
| Rheometer - ARES LS1 | Characterization | $10.80 | $16.20 | $21.60 | $47.90 | $63.90 | |
| RIE/ICP - Trion | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| RIE/ICP - Unaxis SLR | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| RTA, Steag 100CS RTP | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| RTA, SSI Solaris 150 | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Solvent Bench #1 Lift Off | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Solvent Bench #1 PR Strip | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Solvent Bench 2 - hot plate and workspace | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Sputter Deposition, KJL CMS-18 Multi-Source | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| TSI PSD 3603 (Aerosizer) | Characterization | $37.10 | $55.60 | $74.20 | $136.00 | $181.30 | |
| XPS - ULVAC-PHI XPS | Characterization | $63.90 | $95.80 | $127.70 | $199.30 | $265.70 | |
| UV/Vis - Perkin-Elmer Lambda 800 | Characterization | $37.10 | $55.60 | $74.20 | $136.00 | $181.30 | |
| SEM - Hitachi S-3000 | Characterization | $37.10 | $55.60 | $74.20 | $119.70 | $159.70 | |
| Wafer Bonder, EVG 501 | Fabrication | $34.00 | $51.00 | $68.00 | $51.00 | $68.00 | |
| Panalytical XPert Powder | Characterization | $26.80 | $40.20 | $53.60 | $159.10 | $212.20 | |
| RIE - Unaxis 790 RIE | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| FIB/SEM - FEI Helios NanoLab 600i dual beam | Characterization | $69.00 | $103.50 | $138.00 | $199.30 | $265.70 | |
| DRIE - Oxford Plasma Pro | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| Spin Dryer - Sitek | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Asher - Tepla M4L | Fabrication | $46.40 | $69.50 | $92.70 | $69.50 | $92.70 | |
| S/TEM - FEI Tecnai F20 | Characterization | $74.20 | $111.20 | $148.30 | $193.10 | $257.50 | |
| PECVD - Unaxis 790 PECVD | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| PDMS Process Tools - Room 235 | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Autosorb iQ - Analysis (Ar, CO2, He) | Characterization | $2.10 | $3.10 | $4.10 | $12.40 | $16.50 | |
| Autosorb iQ - Outgassing (monitor) | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Autosorb iQ - Krypton | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Malvern Zetasizer Ultra | Characterization | $37.10 | $55.60 | $74.20 | $136.00 | $181.30 | |
| Zeiss Microscope | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| PDMS-Spinner | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Litho Process Suss Delta 20 & Hot Plate | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| S/TEM - FEI Talos F200i | Characterization | $74.20 | $111.20 | $148.30 | $193.10 | $257.50 | |
| Amira - Tomography Software | Characterization | $7.70 | $11.60 | $23.20 | $38.60 | $51.50 | |
| Sputter Deposition, AJA - STAFF ONLY | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| S/TEM - FEI Themis Z | Characterization | $82.40 | $123.60 | $148.30 | $231.80 | $309.00 | |
| Versa software workstation | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Xnovo software workstation | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Litho Process BSC-100 Spinner | Fabrication | $34.00 | $51.00 | $68.00 | $51.00 | $68.00 | |
| Sputter Deposition, Evatec Clusterline 200 | Fabrication | $103.00 | $154.50 | $206.00 | $154.50 | $309.00 | |
| Amerimade Bench BOE/HF | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | $35 charge for bath refills |
| Amerimade Bench SC1/SC2 | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | $35 surcharge per use |
| Heidelberg Laser Writer | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | $500 Cap for long exposure (8+ hours) by staff per single mask (Only UF PIs) |
| 4 Point Probe Station | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Customer use only |
| Nikon LV100 Microscope | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Customer use only |
| Struers Tegramin 30 Polisher | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Customer use only |
| Panalytical XPert MRD | Characterization | $26.80 | $40.20 | $53.60 | $162.20 | $216.30 | Published rates are for first 3 hours. Rate then decreases to $6.50/hr. for Internal, $9.75/hr. for Ext. Acad/Gov, $13/hr. Ext. Intl. Acad, $19.5/hr. for Ext. Affiliated, $26/hr. for External. Runs not to exceed 12 hours in total. |
| Cameca SX Five FE EPMA | Characterization | $53.60 | $80.30 | $107.10 | $162.20 | $216.30 | Published rates are for first 8 hours. Rate then decreases to $13/hr. for Internal, $19.50/hr. for Ext. Acad/Gov, $26/hr. Ext. Intl. Acad, $39/hr. for Ext. Affiliated, $52/hr. for External. Runs not to exceed 24 hours in total. |
| SEM - Tescan MIRA3 | Characterization | $63.90 | $95.80 | $127.70 | $162.20 | $216.30 | Published rates are for first 8 hours. Rate then decreases to $15.50/hr. for Internal, $23.25/hr. for Ext. Acad/Gov, $31/hr. Ext. Intl. Acad, $46.50/hr. for Ext. Affiliated, $62/hr. for External. Runs not to exceed 24 hours in total. |
| FIB/SEM - FEI Helios G4 PFIB CXe dual beam | Characterization | $69.00 | $103.50 | $138.00 | $199.30 | $265.70 | Published rates are for first 8 hours. Rate then decreases to $`16.75/hr. for Internal, $25.13/hr. for Ext. Acad/Gov, $33.50/hr. Ext. Intl. Acad, $50.25/hr. for Ext. Affiliated, $67/hr. for External. Runs not to exceed 24 hours in total. |
| Nano-CT - GE v|tome|x m 240 | Characterization | $37.10 | $55.60 | $74.20 | $239.50 | $319.30 | Rates are for first 3 hours. Additional hours (up to 12 hours) for each rate class are: $9/hr, $13.50/hr, $18/hr, $58.13/hr, and $77.50/hr |
| ZEISS Versa 620 XRM | Characterization | $37.10 | $55.60 | $74.20 | $239.50 | $319.30 | Rates are for first 3 hours. Additional hours (up to 24 hours) for each rate class are: $9/hr, $13.50/hr, $18/hr, $27/hr, and $36/hr |
| Labconco Triad Freeze Dryer | Characterization | $31.90 | $47.90 | $63.90 | $47.90 | $63.90 | Rates are per day |
| NRF Cleanroom | Fabrication | $18.50 | $23.70 | $23.70 | $23.70 | $23.70 | Rates are per day |
| SCS Parylene Coater | Fabrication | $26.80 | $40.20 | $53.60 | $38.60 | $53.60 | Rates are per run |
| Critical Point Dryer | Fabrication | $63.90 | $95.80 | $127.70 | $95.80 | $127.70 | Rates are per run. $20 surcharge per use |
| ALD - Cambridge Nano Fiji 200 | Fabrication | $95.80 | $143.70 | $191.60 | $143.70 | $191.60 | Rates are per run. (Max run 24 hrs) |
| Objet 3D Printer | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Service work only |
| Furnace Tube, Tystar #1 Wet and dry Ox | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | Staff run only |
| Raith 150, e-beam lithography | Fabrication | $31.90 | $47.90 | $63.90 | $47.90 | $63.90 | Staff run only |
| Coater - Carbon | Characterization | $16.00 | $23.90 | $31.90 | $32.40 | $43.30 | Staff run only |
| Coater - Hummer V Au-Pd | Characterization | $16.00 | $23.90 | $31.90 | $32.40 | $43.30 | Staff run only |
| Coater - SPI Au-Pd | Characterization | $16.00 | $23.90 | $31.90 | $32.40 | $43.30 | Staff run only |
| Allied Multi-prep Lapping and Polishing system | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Users must purchase their own consumables for this equipment. |