Furnace Tube, Tystar #1 Wet and dry Ox - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $37.50/Hour
    • External Affiliated Commercial/Industrial: $37.50/Hour
    • External Commercial/Industrial: $50.00/Hour
    • External International Academic: $50.00/Hour
    • Internal Standard: $25.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
 IMPORTANT NOTE: All wafers intended for processing in any of the Tystar tubes are to be thoroughly cleaned using the RCA cleaning protocol first!!!

Used for processing up to 50 wafers per batch. Current wafer boats for 3" and 4" wafers. Maximum wafers size is 6".

This is a staff run only resource.

Thermal Oxidation wiki link
Microfabrication wiki link
Capabilities Training Prerequisites Calendar Contacts Docs

IMPORTANT NOTE: All wafers intended for processing in any of the Tystar tubes are to be thoroughly cleaned using the RCA cleaning protocol first!!!

Used for processing up to 50 wafers per batch. For both Wet/Dry Oxidation up to 1050C.

This is a staff run only resource.

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