SCS Parylene Coater - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $39.00/Run
    • External Affiliated Commercial/Industrial: $37.50/Run
    • External Commercial/Industrial: $52.00/Run
    • External International Academic: $52.00/Run
    • Internal Standard: $26.00/Run
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Microscopy Sample Prep (125)
  • In Cleanroom: No
  • Main Contact: Scott Gapinski

This tool is capable of depositing parylene material over substrates of varying size.

Parylene wiki link

Training Video (YouTube)

Capabilities Training Prerequisites Calendar Contacts Docs

This system is used to deposit a thin film of parylene, a unique polymer that provides thermal, moisture, and dielectric barriers to any vacuum compatible substrate. It is biocompatible, truly conformal (pin-hole free at 25nm thickness), and has a high mechanical strength. There are several types of parylene with differing levels and combinations of these properties.

Capable of depositing Parylene C and N.

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