Sputter Deposition, AJA - STAFF ONLY - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 AJA Multi-Source RF and DC Sputter System

Sputter Deposition wiki link
Microfabrication wiki link
Capabilities Training Prerequisites Calendar Contacts Docs

Key Features: Combinatorial Materials Science thin film sputtering system. 3 gas injected Magnetron sputter sources, DC, RF and load lock module. Gases available: Argon, O2 and N2

Substrate Platen: heating to 474 Deg C, sample rotation up to 15 rpm, up to 6 inch substrates, RF or DC bias sputter magnetic or nonmagnetic materials, reactive sputtering

Operation: This tool is Staff Run Only.

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