Fabrication Equipment Rates

Usage rates are displayed below. For staff assistance, add $50/hr for internal rates, or $55/hr for external rates. Rates are per hour unless otherwise noted. Download Rates to CSV file

Rate Classes

  • Internal - University of Florida accounts
  • Ext. Acad/Gov - Non-UF Academic or Government
  • Ext. Intl. Acad - Non-UF International Academic
  • Ext. Affiliated - Affiliated Commercial/Industrial (25% discount for member companies)
  • External - Commercial/Industrial

FY2026 Rate Listing

Show: All Characterization Fabrication

Name Type Internal Ext. Acad / Gov Ext. Intl. Acad Ext. Affiliated External Notes
4 Point Probe Station Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
ALD - Cambridge Nano Fiji 200 Fabrication $95.80 $143.70 $191.60 $143.70 $191.60 Rates are per run. (Max run 24 hrs)
Allied Multi-prep Lapping and Polishing system Characterization $0.00 $0.00 $0.00 $0.00 $0.00 Users must purchase their own consumables for this equipment.
Amerimade Bench BOE/HF Fabrication $25.80 $38.60 $51.50 $38.60 $51.50 $35 charge for bath refills
Amerimade Bench SC1/SC2 Fabrication $25.80 $38.60 $51.50 $38.60 $51.50 $35 surcharge per use
Asher - Anatech Barrel SCE600 Fabrication $46.40 $69.50 $92.70 $69.50 $92.70
Asher - Tepla M4L Fabrication $46.40 $69.50 $92.70 $69.50 $92.70
Critical Point Dryer Fabrication $63.90 $95.80 $127.70 $95.80 $127.70 Rates are per run. $20 surcharge per use
Dicing Saws- ADT Fabrication $42.70 $64.10 $85.50 $64.10 $85.50
DRIE - Deep RIE, STS Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
DRIE - Oxford Plasma Pro Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
E-beam evaporator, PVD Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
Electronic Measurement, Lakeshore 7507 Fabrication $21.60 $32.40 $43.30 $32.40 $43.30
Flexus 2320 Fabrication $21.60 $32.40 $43.30 $32.40 $43.30
Furnace Tube, Thermcraft, General Hot Process Fabrication $21.60 $32.40 $43.30 $32.40 $43.30
Furnace Tube, Tystar #1 Wet and dry Ox Fabrication $25.80 $38.60 $51.50 $38.60 $51.50 Staff run only
General Acids/Bases Bench-Left Fabrication $25.80 $38.60 $51.50 $38.60 $51.50
Heidelberg Laser Writer Fabrication $51.00 $76.50 $102.00 $76.50 $102.00 $500 Cap for long exposure (8+ hours) by staff per single mask (Only UF PIs)
JST Wet Bench Fabrication $25.80 $38.60 $51.50 $38.60 $51.50
K&S 4124 Ball Bonder, Gold Ball Fabrication $29.90 $44.80 $59.70 $44.80 $59.70
K&S 4700 Wedge Bonder (Staff Run) Fabrication $29.90 $44.80 $59.70 $44.80 $59.70
Litho Process BSC-100 Spinner Fabrication $34.00 $51.00 $68.00 $51.00 $68.00
Litho Process EVG Model 620 w/BSA Fabrication $46.90 $70.30 $93.70 $70.30 $93.70
Litho Process Karl Suss MA6 Fabrication $46.90 $70.30 $93.70 $70.30 $93.70
Litho Process Laurell Litho Bay & Hot Plate/Oven Fabrication $34.00 $51.00 $68.00 $51.00 $68.00
Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven Fabrication $34.00 $51.00 $68.00 $51.00 $68.00
Litho Process Suss Delta 20 & Hot Plate Fabrication $46.90 $70.30 $93.70 $70.30 $93.70
Litho Process Suss Delta 80 & Hot Plate/Oven Fabrication $46.90 $70.30 $93.70 $70.30 $93.70
Nikon LV100 Microscope Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
NRF Cleanroom Fabrication $18.50 $23.70 $23.70 $23.70 $23.70 Rates are per day
Objet 3D Printer Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Service work only
Oven, YES, Image Reversal/HMDS Fabrication $17.00 $25.50 $34.00 $25.50 $34.00
PDMS Process Tools - Room 235 Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
PDMS-Spinner Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
PECVD - STS 310PC SiO2 - SiN - Amorphous Si Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
PECVD - Unaxis 790 PECVD Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
Photospectrometer, Filmetrics F40 Fabrication $21.60 $32.40 $43.30 $32.40 $43.30
Profilometer, Dektak 150 Fabrication $46.90 $70.30 $93.70 $70.30 $93.70
Raith 150, e-beam lithography Fabrication $31.90 $47.90 $63.90 $47.90 $63.90 Staff run only
RIE - Unaxis 790 RIE Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
RIE/ICP - Trion Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
RIE/ICP - Unaxis SLR Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
RTA, SSI Solaris 150 Fabrication $46.90 $70.30 $93.70 $70.30 $93.70
RTA, Steag 100CS RTP Fabrication $46.90 $70.30 $93.70 $70.30 $93.70
SCS Parylene Coater Fabrication $26.80 $40.20 $53.60 $38.60 $53.60 Rates are per run
SEM - JEOL 5700 Fabrication $46.90 $70.30 $93.70 $70.30 $93.70
Solvent Bench #1 Lift Off Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Solvent Bench #1 PR Strip Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Solvent Bench 2 - hot plate and workspace Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Spin Dryer - Sitek Fabrication $0.00 $0.00 $0.00 $0.00 $0.00
Sputter Deposition, AJA - STAFF ONLY Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
Sputter Deposition, Evatec Clusterline 200 Fabrication $103.00 $154.50 $206.00 $154.50 $309.00
Sputter Deposition, KJL CMS-18 Multi-Source Fabrication $51.00 $76.50 $102.00 $76.50 $102.00
Struers Tegramin 30 Polisher Fabrication $0.00 $0.00 $0.00 $0.00 $0.00 Customer use only
Wafer Bonder, EVG 501 Fabrication $34.00 $51.00 $68.00 $51.00 $68.00
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