Fabrication Equipment Rates
Usage rates are displayed below. For staff assistance, add $50/hr for internal rates, or $55/hr for external rates. Rates are per hour unless otherwise noted. Download Rates to CSV file
Rate Classes
- Internal - University of Florida accounts
- Ext. Acad/Gov - Non-UF Academic or Government
- Ext. Intl. Acad - Non-UF International Academic
- Ext. Affiliated - Affiliated Commercial/Industrial (25% discount for member companies)
- External - Commercial/Industrial
FY2026 Rate Listing
Show:
| Name | Type | Internal | Ext. Acad / Gov | Ext. Intl. Acad | Ext. Affiliated | External | Notes |
|---|---|---|---|---|---|---|---|
| 4 Point Probe Station | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Customer use only |
| ALD - Cambridge Nano Fiji 200 | Fabrication | $95.80 | $143.70 | $191.60 | $143.70 | $191.60 | Rates are per run. (Max run 24 hrs) |
| Allied Multi-prep Lapping and Polishing system | Characterization | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Users must purchase their own consumables for this equipment. |
| Amerimade Bench BOE/HF | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | $35 charge for bath refills |
| Amerimade Bench SC1/SC2 | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | $35 surcharge per use |
| Asher - Anatech Barrel SCE600 | Fabrication | $46.40 | $69.50 | $92.70 | $69.50 | $92.70 | |
| Asher - Tepla M4L | Fabrication | $46.40 | $69.50 | $92.70 | $69.50 | $92.70 | |
| Critical Point Dryer | Fabrication | $63.90 | $95.80 | $127.70 | $95.80 | $127.70 | Rates are per run. $20 surcharge per use |
| Dicing Saws- ADT | Fabrication | $42.70 | $64.10 | $85.50 | $64.10 | $85.50 | |
| DRIE - Deep RIE, STS | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| DRIE - Oxford Plasma Pro | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| E-beam evaporator, PVD | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| Electronic Measurement, Lakeshore 7507 | Fabrication | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| Flexus 2320 | Fabrication | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| Furnace Tube, Thermcraft, General Hot Process | Fabrication | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| Furnace Tube, Tystar #1 Wet and dry Ox | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | Staff run only |
| General Acids/Bases Bench-Left | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | |
| Heidelberg Laser Writer | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | $515 Cap for long exposure (8+ hours) by staff per single mask (Only UF PIs) |
| JST Wet Bench | Fabrication | $25.80 | $38.60 | $51.50 | $38.60 | $51.50 | |
| K&S 4124 Ball Bonder, Gold Ball | Fabrication | $29.90 | $44.80 | $59.70 | $44.80 | $59.70 | |
| K&S 4700 Wedge Bonder (Staff Run) | Fabrication | $29.90 | $44.80 | $59.70 | $44.80 | $59.70 | |
| Litho Process BSC-100 Spinner | Fabrication | $34.00 | $51.00 | $68.00 | $51.00 | $68.00 | |
| Litho Process EVG Model 620 w/BSA | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Litho Process Karl Suss MA6 | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Litho Process Laurell Litho Bay & Hot Plate/Oven | Fabrication | $34.00 | $51.00 | $68.00 | $51.00 | $68.00 | |
| Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven | Fabrication | $34.00 | $51.00 | $68.00 | $51.00 | $68.00 | |
| Litho Process Suss Delta 20 & Hot Plate | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Litho Process Suss Delta 80 & Hot Plate/Oven | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Nikon LV100 Microscope | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Customer use only |
| NRF Cleanroom | Fabrication | $18.50 | $23.70 | $23.70 | $23.70 | $23.70 | Rates are per day |
| Objet 3D Printer | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Service work only |
| Oven, YES, Image Reversal/HMDS | Fabrication | $17.00 | $25.50 | $34.00 | $25.50 | $34.00 | |
| PDMS Process Tools - Room 235 | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| PDMS-Spinner | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| PECVD - STS 310PC SiO2 - SiN - Amorphous Si | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| PECVD - Unaxis 790 PECVD | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| Photospectrometer, Filmetrics F40 | Fabrication | $21.60 | $32.40 | $43.30 | $32.40 | $43.30 | |
| Profilometer, Dektak 150 | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Raith 150, e-beam lithography | Fabrication | $31.90 | $47.90 | $63.90 | $47.90 | $63.90 | Staff run only |
| RIE - Unaxis 790 RIE | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| RIE/ICP - Trion | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| RIE/ICP - Unaxis SLR | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| RTA, SSI Solaris 150 | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| RTA, Steag 100CS RTP | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| SCS Parylene Coater | Fabrication | $26.80 | $40.20 | $53.60 | $38.60 | $53.60 | Rates are per run |
| SEM - JEOL 5700 | Fabrication | $46.90 | $70.30 | $93.70 | $70.30 | $93.70 | |
| Solvent Bench #1 Lift Off | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Solvent Bench #1 PR Strip | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Solvent Bench 2 - hot plate and workspace | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Spin Dryer - Sitek | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | |
| Sputter Deposition, AJA - STAFF ONLY | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| Sputter Deposition, Evatec Clusterline 200 | Fabrication | $103.00 | $154.50 | $206.00 | $154.50 | $309.00 | |
| Sputter Deposition, KJL CMS-18 Multi-Source | Fabrication | $51.00 | $76.50 | $102.00 | $76.50 | $102.00 | |
| Struers Tegramin 30 Polisher | Fabrication | $0.00 | $0.00 | $0.00 | $0.00 | $0.00 | Customer use only |
| Wafer Bonder, EVG 501 | Fabrication | $34.00 | $51.00 | $68.00 | $51.00 | $68.00 |