E-beam evaporator, PVD - Status: In Use
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4 pocket 15cc e-beam,
one 3" DC sputter source,
substrate heater Reservations are required and must be made 24 hrs in advance. E-Beam evaporator Wiki Link Microfabrication wiki link Latest Status Log EntryApr 25, 2024 - User Note: Targets: Ag, Au, Pd, Ti. |
4 pocket 15cc e-beam,
one 3" DC sputter source,
substrate heater
Reservations are required and must be made 24 hrs in advance with the earliest being 10AM. Materials and thickness requests must be stated in the reservation so that the routine can be written and ready for your run.
Available E-beam Consumables: - User Owned, Ag, Al, Au, Co - Cobalt, Cr, Cu, Ge, Ir, Mo, Ni, Pd, Si - undoped, Ta, Ti, W
An active Gatorlink login is required to create a new reservation.