E-beam evaporator, PVD - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
 4 pocket 15cc e-beam, one 3" DC sputter source, substrate heater

Reservations are required and must be made 24 hrs in advance.

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4 pocket 15cc e-beam, one 3" DC sputter source, substrate heater

Reservations are required and must be made 24 hrs in advance with the earliest being 10AM. Materials and thickness requests must be stated in the reservation so that the routine can be written and ready for your run.

Available E-beam Consumables: - User Owned, Ag, Al, Au, Co - Cobalt, Cr, Cu, Ge, Ir, Mo, Ni, Pd, Si - undoped, Ta, Ti, W (Staff-only, no photoresist)

An active Gatorlink login is required to create a new reservation.