E-beam evaporator, PVD - Status: Down
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4 pocket 15cc e-beam,
one 3" DC sputter source,
substrate heater Reservations are required and must be made 24 hrs in advance. E-Beam evaporator Wiki Link Microfabrication wiki link Latest Status Log EntryMay 13, 2024 - Resource Status Down - Going down for facility outrage and Cryopump regen. |
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