Critical Point Dryer - Status: Down
General Information
- Current Status:
- Down
- Use Rates:
- External Academic & Government:
- $95.80/Run
- External Affiliated Commercial/Industrial:
- $95.80/Run
- External Commercial/Industrial:
- $127.70/Run
- External International Academic:
- $127.70/Run
- Internal Standard:
- $63.90/Run
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- In Cleanroom:
- Yes
- Main Contact:
- David Hays
Description
The Tousimis critical point dryer is a fully automatic system used to dry fragile MEMS/NEMS samples after a wet release process.
Capabilities
The Tousimis critical point dryer is a fully automatic system used to dry fragile MEMS/NEMS samples after a wet release process. By using LCO2 as the transitional fluid at the critical point, it eliminates stiction and surface tension problems. The tool is capable of processing samples from 6 inch wafers to small pieces in about an hour.
Each tool run has a consumable fee of $20 to recover the acid, solvent and LCO2 costs.
An active Gatorlink login is required to create a new reservation.
