Flexus 2320 - Status: Available
General Information
- Current Status:
- Available
- Use Rates:
- External Academic & Government:
- $32.40/Hour
- External Affiliated Commercial/Industrial:
- $32.40/Hour
- External Commercial/Industrial:
- $43.30/Hour
- External International Academic:
- $43.30/Hour
- Internal Standard:
- $21.60/Hour
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- In Cleanroom:
- Yes
- Main Contact:
- David Hays
Description
The Flexus 2320 determines wafer curvature by measuring the angle of deflection of a laser beam off the surface 6”, 4”, 3” and 2” diameter substrates. Film stress is determined by comparing the change in radius of curvature of the substrate, with and without the film.
Capabilities
The Flexus 2320 determines wafer curvature by measuring the angle of deflection of a laser beam off the surface 6”, 4”, 3” and 2” diameter substrates. Film stress is determined by comparing the change in radius of curvature of the substrate, with and without the film.
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