Photospectrometer, Filmetrics F40 - Status: Available
General Information
- Current Status:
- Available
- Use Rates:
- External Academic & Government:
- $32.40/Hour
- External Affiliated Commercial/Industrial:
- $32.40/Hour
- External Commercial/Industrial:
- $43.30/Hour
- External International Academic:
- $43.30/Hour
- Internal Standard:
- $21.60/Hour
- Service:
- Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
- Building:
- NANO (0070)
- In Cleanroom:
- Yes
- Main Contact:
- David Hays
Description
The Filmetrics F40 is used to measure the thickness and optical constants (n&k) of dielectric and semiconductor thin films. Measured films must be optically smooth and within the range of 30A to 40um.Transmission-vs- wavelength can also be measured if substrate is transparent. Commonly measured films include nitrides, oxides, photoresists, polysilicon, polyimides, cell gaps, etc.
Capabilities
The Filmetrics F40 is used to measure the thickness and optical constants (n&k) of dielectric and semiconductor thin films. Measured films must be optically smooth and within the range of 30A to 40um.Transmission-vs- wavelength can also be measured if substrate is transparent. Commonly measured films include nitrides, oxides, photoresists, polysilicon, polyimides, cell gaps, etc.
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