| 3D Printing |
Objet 3D Printer |
Available |
| Dicing/Bonding |
Dicing Saws- ADT |
Available |
| Dicing/Bonding |
K&S 4124 Ball Bonder, Gold Ball |
Available |
| Dicing/Bonding |
K&S 4700 Wedge Bonder (Staff Run) |
Available |
| Dicing/Bonding |
Wafer Bonder, EVG 501 |
Available |
| Electron Microscopy/Microanalysis |
S/TEM - FEI Themis Z |
Down |
| Film Deposition |
ALD - Cambridge Nano Fiji 200 |
Available |
| Film Deposition |
ALD - Veeco Fiji 200 |
In Use |
| Film Deposition |
E-beam evaporator, PVD |
Available |
| Film Deposition |
PECVD - STS 310PC SiO2 - SiN - Amorphous Si |
Available |
| Film Deposition |
PECVD - Unaxis 790 PECVD |
Available |
| Film Deposition |
SCS Parylene Coater |
Down |
| Film Deposition |
Sputter Deposition, AJA - STAFF ONLY |
Available |
| Film Deposition |
Sputter Deposition, Evatec Clusterline 200 |
In Use |
| Film Deposition |
Sputter Deposition, KJL CMS-18 Multi-Source |
Available |
| Film Deposition |
Sputter Deposition, TFE Batch Vertical PVD |
Available |
| Hot Processing |
Furnace Tube, Thermcraft, General Hot Process |
Available |
| Hot Processing |
Furnace Tube, Tystar #1 Wet and dry Ox |
Available |
| Hot Processing |
RTA, SSI Solaris 150 |
Available |
| Hot Processing |
RTA, Steag 100CS RTP |
Available |
| Metrology |
4 Point Probe Station |
Available |
| Metrology |
Electronic Measurement, Lakeshore 7507 |
Available |
| Metrology |
Flexus 2320 |
Available |
| Metrology |
Nikon LV100 Microscope |
Available |
| Metrology |
Photospectrometer, Filmetrics F40 |
Available |
| Metrology |
Profilometer, Dektak XT |
Available |
| Metrology |
SEM - JEOL 5700 |
Available |
| Other |
PDMS Process Tools - Room 235 |
Available |
| Other |
PDMS-Spinner |
Available |
| Photolithography |
Heidelberg Laser Writer |
Available |
| Photolithography |
Litho Process BSC-100 Spinner |
Available |
| Photolithography |
Litho Process EVG Model 620 w/BSA |
Available |
| Photolithography |
Litho Process Karl Suss MA6 |
Available |
| Photolithography |
Litho Process Laurell Litho Bay & Hot Plate/Oven |
Available |
| Photolithography |
Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven |
Available |
| Photolithography |
Litho Process Suss Delta 20 & Hot Plate |
Available |
| Photolithography |
Litho Process Suss Delta 80 & Hot Plate/Oven |
Available |
| Photolithography |
Oven, YES, Image Reversal/HMDS |
Available |
| Photolithography |
Raith 150, e-beam lithography |
Available |
| Plasma |
Asher - Anatech Barrel SCE600 |
Down |
| Plasma |
Asher - Tepla M4L |
Available |
| Plasma |
DRIE - Deep RIE, STS |
In Use |
| Plasma |
DRIE - Oxford Plasma Pro |
Down |
| Plasma |
RIE - Unaxis 790 RIE |
Available |
| Plasma |
RIE/ICP - Trion |
Down |
| Plasma |
RIE/ICP - Unaxis SLR |
Available |
| Sample Preparation |
Allied Multi-prep Lapping and Polishing system |
Available |
| Sample Preparation |
Struers Tegramin 30 Polisher |
Available |
| Wet Processing |
Amerimade Bench BOE/HF |
Available |
| Wet Processing |
Amerimade Bench SC1/SC2 |
Available |
| Wet Processing |
Critical Point Dryer |
Available |
| Wet Processing |
General Acids/Bases Bench-Left |
Available |
| Wet Processing |
JST Wet Bench |
Available |
| Wet Processing |
Solvent Bench #1 Lift Off |
Available |
| Wet Processing |
Solvent Bench #1 PR Strip |
Available |
| Wet Processing |
Solvent Bench 2 - hot plate and workspace |
Up |
| Wet Processing |
Spin Dryer - Sitek |
Available |
