Equipment by Keywords

To reserve equipment time, or to view more information about an equipment, click on the equipment name. Visit the Equipment Rates page for our equipment rate schedule.

Keyword Name Status
3D Printing Objet 3D Printer In Use
Dicing/Bonding Dicing Saws- ADT Available
Dicing/Bonding K&S 4124 Ball Bonder, Gold Ball Down
Dicing/Bonding K&S 4700 Wedge Bonder (Staff Run) Available
Dicing/Bonding Wafer Bonder, EVG 501 Available
Electron Microscopy/Microanalysis Cameca SX Five FE EPMA Available
Electron Microscopy/Microanalysis EDAX EDS/EBSD on FEI Helios NanoLab 600i dual beam Available
Electron Microscopy/Microanalysis FIB/SEM - FEI Helios G4 PFIB CXe dual beam Available
Electron Microscopy/Microanalysis FIB/SEM - FEI Helios NanoLab 600i dual beam Available
Electron Microscopy/Microanalysis FIB/SEM - Thermo Fisher Scios 2 dual beam Available
Electron Microscopy/Microanalysis S/TEM - FEI Talos F200i Available
Electron Microscopy/Microanalysis S/TEM - FEI Tecnai F20 Down
Electron Microscopy/Microanalysis S/TEM - FEI Themis Z Down
Electron Microscopy/Microanalysis SEM - FEI Nova 430 w/EDS & CL Available
Electron Microscopy/Microanalysis SEM - Hitachi S-3000 Down
Electron Microscopy/Microanalysis SEM - Tescan MIRA3 Available
Film Deposition ALD - Cambridge Nano Fiji 200 Available
Film Deposition ALD - Veeco Fiji 200 In Use
Film Deposition E-beam evaporator, PVD Available
Film Deposition PECVD - STS 310PC SiO2 - SiN - Amorphous Si Available
Film Deposition PECVD - Unaxis 790 PECVD Available
Film Deposition SCS Parylene Coater Down
Film Deposition Sputter Deposition, AJA - STAFF ONLY Available
Film Deposition Sputter Deposition, Evatec Clusterline 200 Available
Film Deposition Sputter Deposition, KJL CMS-18 Multi-Source Available
Film Deposition Sputter Deposition, TFE Batch Vertical PVD Down
Hot Processing Furnace Tube, Thermcraft, General Hot Process Available
Hot Processing Furnace Tube, Tystar #1 Wet and dry Ox Available
Hot Processing RTA, SSI Solaris 150 Available
Hot Processing RTA, Steag 100CS RTP Down
Metrology 4 Point Probe Station Available
Metrology Bruker Optical Profilometer Available
Metrology Electronic Measurement, Lakeshore 7507 Available
Metrology Ellipsometer, J.A. Woolam Available
Metrology Flexus 2320 Available
Metrology Horiba microRaman Available
Metrology Nikon LV100 Microscope Available
Metrology Photospectrometer, Filmetrics F40 Available
Metrology Profilometer, Dektak XT Available
Metrology Profilometer, Tencor AS500 Available
Metrology SEM - JEOL 5700 Available
Metrology Zeiss Microscope Available
Other Dessicator Available
Other PDMS Process Tools - Room 235 Available
Other PDMS-Spinner Available
Other Analytical Techniques Rheometer - ARES LS1 Available
Particle Analysis/Characterization Coulter LS13320 Available
Particle Analysis/Characterization Malvern Zetasizer Ultra Available
Particle Analysis/Characterization TSI PSD 3603 (Aerosizer) Down
Photolithography Heidelberg Laser Writer Available
Photolithography Litho Process BSC-100 Spinner Available
Photolithography Litho Process EVG Model 620 w/BSA Available
Photolithography Litho Process Karl Suss MA6 Available
Photolithography Litho Process Laurell Litho Bay & Hot Plate/Oven Available
Photolithography Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven Available
Photolithography Litho Process Suss Delta 20 & Hot Plate Available
Photolithography Litho Process Suss Delta 80 & Hot Plate/Oven Available
Photolithography Oven, YES, Image Reversal/HMDS Available
Photolithography Raith 150, e-beam lithography Available
Plasma Asher - Anatech Barrel SCE600 Available
Plasma Asher - Tepla M4L Available
Plasma DRIE - Deep RIE, STS Down
Plasma DRIE - Oxford Plasma Pro Available
Plasma RIE - Unaxis 790 RIE Available
Plasma RIE/ICP - Trion Down
Plasma RIE/ICP - Unaxis SLR Available
Porosimetry/Porometry/Surface Area Autosorb iQ - Analysis (Ar, CO2, He) In Use
Porosimetry/Porometry/Surface Area Autosorb iQ - Krypton Available
Porosimetry/Porometry/Surface Area Autosorb iQ - Outgassing (monitor) In Use
Porosimetry/Porometry/Surface Area Quantachrome PoreMaster Mercury Porosimeter Available
Porosimetry/Porometry/Surface Area Quantachrome Porometer 3g zh Available
Sample Preparation Allied Multi-prep Lapping and Polishing system Available
Sample Preparation Coater - Carbon Available
Sample Preparation Coater - Hummer V Au-Pd Available
Sample Preparation Coater - SPI Au-Pd Available
Sample Preparation Labconco Triad Freeze Dryer Available
Sample Preparation Struers Tegramin 30 Polisher Available
Spectroscopy FTIR/FTIR Microscope - ThermoFisher iS50 Available
Spectroscopy Horiba microRaman Available
Spectroscopy SEM - FEI Nova 430 w/EDS & CL Available
Spectroscopy UV/Vis - Perkin-Elmer Lambda 800 Available
Surface Analysis/Characterization Bruker Optical Profilometer Available
Surface Analysis/Characterization Ellipsometer, J.A. Woolam Available
Surface Analysis/Characterization Perkin-Elmer PHI 660 - AES Available
Surface Analysis/Characterization SPM/AFM Dimension 3100 In Use
Surface Analysis/Characterization XPS - ULVAC-PHI XPS Available
Wet Processing Amerimade Bench BOE/HF Available
Wet Processing Amerimade Bench SC1/SC2 Available
Wet Processing Critical Point Dryer Down
Wet Processing General Acids/Bases Bench-Left Available
Wet Processing JST Wet Bench Available
Wet Processing Solvent Bench #1 Lift Off Available
Wet Processing Solvent Bench #1 PR Strip Available
Wet Processing Solvent Bench 2 - hot plate and workspace Up
Wet Processing Spin Dryer - Sitek Available
X-Ray Analysis/Characterization Amira - Tomography Software Up
X-Ray Analysis/Characterization Nano-CT - GE v|tome|x m 240 Available
X-Ray Analysis/Characterization Nano-CT Image Processing/Reconstruction System Available
X-Ray Analysis/Characterization Panalytical XPert MRD Available
X-Ray Analysis/Characterization Panalytical XPert Powder Available
X-Ray Analysis/Characterization Versa software workstation Down
X-Ray Analysis/Characterization Xnovo software workstation In Use
X-Ray Analysis/Characterization XRD Software Workstation Available
X-Ray Analysis/Characterization ZEISS Versa 620 XRM Available
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