FIB/SEM - Thermo Fisher Scios 2 dual beam - Status: Available
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The Thermo Scientifc™ Scios™ 2 DualBeam™ Focused Ion Beam Scanning Electron microscope (FIB-SEM) is an SEM paired with a Ga FIB to produce high-quality, site-specific STEM lamella and cross sections. It is equipped with an EasyLift System for in situ sample manipulation including removing lamella from bulk samples and attaching to STEM grids. |
The Scios 2 has a NICol ultra-high resolution non-immersion field emission-SEM column with acceleration voltages from 500 V to 30 kV and a current range from 0.78 pA to 0.10 µm. The resolution at the optimum working distance is 0.7 nm at 30 keV and 1.4 nm at 1 keV. The Sidewinder ion column is a gallium source with 500 V to 30 kV accelerating voltage and beam currents ranging from 1.5 pA to 65 nA. The ion beam resolution is 3 nm at 30kV using the selective edge method. The system has an Everhart-Thornley SE Detector (ETD) along with the Trinity Detection System (in-lens and in-column): – T1 segmented lower in-lens detector – T2 upper in-lens detector – T3 in-column detector. There is also an IR camera for viewing the chamber and in-chamber Nav-Cam sample navigation camera. The xT software has built-in milling and deposition patterns, and BMP or stream files can be directly imported. The five-axis motorized stage can tilt from -15 to 90° and rotate 360°. Also included are the EasyLift system for sample manipulation and gas injection system (GIS) that currently has a platinum precursor for beam-induced deposition.
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