FIB/SEM - Thermo Fisher Scios 2 dual beam - Status: Available
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The Thermo Scientifc™ Scios™ 2 DualBeam™ Focused Ion Beam Scanning Electron microscope (FIB-SEM) is an SEM paired with a Ga FIB to produce high-quality, site-specific STEM lamella and cross sections. It is equipped with an EasyLift System for in situ sample manipulation including removing lamella from bulk samples and attaching to STEM grids.
TF Scios 2 Datasheet Wikipedia FIB |
The Scios 2 has a NICol ultra-high resolution non-immersion field emission-SEM column with acceleration voltages from 500 V to 30 kV and a current range from 0.78 pA to 0.10 µm. The resolution at the optimum working distance is 0.7 nm at 30 keV and 1.4 nm at 1 keV. The Sidewinder ion column is a gallium source with 500 V to 30 kV accelerating voltage and beam currents ranging from 1.5 pA to 65 nA. The ion beam resolution is 3 nm at 30kV using the selective edge method. The system has an Everhart-Thornley SE Detector (ETD) along with the Trinity Detection System (in-lens and in-column): – T1 segmented lower in-lens detector – T2 upper in-lens detector – T3 in-column detector. There is also an IR camera for viewing the chamber and in-chamber Nav-Cam sample navigation camera. The xT software has built-in milling and deposition patterns, and BMP or stream files can be directly imported. The five-axis motorized stage can tilt from -15 to 90° and rotate 360°. Also included are the EasyLift system for sample manipulation and gas injection system (GIS) that currently has a platinum precursor for beam-induced deposition.
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