PECVD - STS 310PC SiO2 - SiN - Amorphous Si - Status: Available

Current Status: Available
Training: View Topics/Sessions
Use Rates:
- External Academic & Government: $76.50/Hour
- External Affiliated Commercial/Industrial: $76.50/Hour
- External Commercial/Industrial: $102.00/Hour
- External International Academic: $102.00/Hour
- Internal Standard: $51.00/Hour
Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
Building: NANO (0070)
Room: Cleanroom, Film Deposition (164)
In Cleanroom: Yes
Main Contact: David Hays

STS 310PC - Plasma Enhanced Chemical Vapor Deposition System.

PECVD wiki link
Microfabrication wiki link

Training Topic	Description	Rates	Approx Session Length (hrs)
PECVD-STS Training		Standard Rate: $21.00/Complete User Training	1

Start	End	Availability	Location	Options
Wed, Dec. 17, 2025 1:30 PM	Wed, Dec. 17, 2025 2:30 PM	1 Seats out of 1	NRF	Sign Up
Thu, Jan. 1, 2026 9:00 AM	Thu, Jan. 1, 2026 10:00 AM	1 Seats out of 1	NRF	Sign Up
Wed, Jan. 14, 2026 1:30 PM	Wed, Jan. 14, 2026 2:30 PM	1 Seats out of 1	NRF	Sign Up
Thu, Jan. 29, 2026 9:00 AM	Thu, Jan. 29, 2026 10:00 AM	1 Seats out of 1	NRF	Sign Up

To request a training session at a custom date & time, please click an option below.

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