Open House 2026 Weekly Update

ALD - Veeco Fiji 200 - Status: In Use
  • Current Status: In Use
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $143.70/Run(24h)
    • External Affiliated Commercial/Industrial: $143.70/Run(24h)
    • External Commercial/Industrial: $191.60/Run(24h)
    • External International Academic: $191.60/Run(24h)
    • Internal Standard: $95.80/Run(24h)
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
 Veeco Fiji 200 - ALD system with thermal, plasma, and exposure (allows for deposition in high aspect ratio features) deposition capabilities.

Capabilities Training Prerequisites Calendar Contacts Docs
Title
Veeco ALD picDownload
Veeco ALD Precursor SurchageDownload
Veeco SOPDownload

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