PECVD - Unaxis 790 PECVD - Status: Down

Current Status: Down
Training: View Topics/Sessions
Use Rates:
- External Academic & Government: $76.50/Hour
- External Affiliated Commercial/Industrial: $76.50/Hour
- External Commercial/Industrial: $102.00/Hour
- External International Academic: $102.00/Hour
- Internal Standard: $51.00/Hour
Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
Building: NANO (0070)
Room: Cleanroom, Film Deposition (164)
In Cleanroom: Yes
Main Contact: Bill Lewis

Unaxis 790 PECVD - Plasma Enhanced Chemical Vapor Deposition System.

PECVD wiki link
Microfabrication wiki link

Training Topic	Description	Rates	Approx Session Length (hrs)
PECVD-Unaxis Training		Standard Rate: $21.00/Complete User Training	1

Start	End	Availability	Location	Options
Thu, Jan. 29, 2026 10:30 AM	Thu, Jan. 29, 2026 11:30 AM	1 Seats out of 1	NRF	Sign Up
Wed, Feb. 11, 2026 3:00 PM	Wed, Feb. 11, 2026 4:00 PM	1 Seats out of 1	NRF	Sign Up
Thu, Feb. 26, 2026 10:30 AM	Thu, Feb. 26, 2026 11:30 AM	1 Seats out of 1	NRF	Sign Up
Wed, Mar. 11, 2026 3:00 PM	Wed, Mar. 11, 2026 4:00 PM	1 Seats out of 1	NRF	Sign Up

To request a training session at a custom date & time, please click an option below.

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