Asher - Anatech Barrel SCE600 - Status: Available

Current Status: Available
Training: View Topics/Sessions
Use Rates:
- External Academic & Government: $69.50/Hour
- External Affiliated Commercial/Industrial: $69.50/Hour
- External Commercial/Industrial: $92.70/Hour
- External International Academic: $92.70/Hour
- Internal Standard: $46.40/Hour
Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
Building: NANO (0070)
Room: Cleanroom, Dry Etch (162)
In Cleanroom: Yes
Main Contact: David Hays

Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.

NOTE: The training only takes 10-15 mins. For training, please select standard training and once it has cleared PI approval, contact a NRF Staff member that is in the cleanroom 8-5 Mon-Fri and they will provide this.

Capabilities Training Prerequisites Calendar Contacts Docs

Use Prerequisites

Prerequisite	Description	Status
Computer Access	Requires computer access be setup	Check Your Status
Funding Source	Requires permission to an active funding source	Check Your Status
Work Plan	Requires a work plan be approved by PI and staff	Check Your Status
Agreement Form	Requires completed agreement form for equipment usage	Check Your Status
NRF Safety Training	Requires completion of safety training	Check Your Status
UF myTraining Course Completion	Requires completion of myTraining courses.	Check Your Status
NRF Building Access	Requires issue of an id badge and entry badge and/or access level to be set.	Check Your Status
Equipment Training	Requires completion of equipment training	Check Your Status

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