Asher - Anatech Barrel SCE600 - Status: Available
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Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.
Plasma Ashing wiki link Microfabrication wiki link NOTE: The training only takes 10-15 mins. For training, please select standard training and once it has cleared PI approval, contact a NRF Staff member that is in the cleanroom 8-5 Mon-Fri and they will provide this. |
Use Prerequisites
Prerequisite | Description | Status |
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Computer Access | Requires computer access be setup | Check Your Status |
Funding Source | Requires permission to an active funding source | Check Your Status |
Work Plan | Requires a work plan be approved by PI and staff | Check Your Status |
Agreement Form | Requires completed agreement form for equipment usage | Check Your Status |
NRF Safety Training | Requires completion of safety training | Check Your Status |
NRF Building Access | Requires issue of an id badge and entry badge and/or access level to be set. | Check Your Status |
Equipment Training | Requires completion of equipment training | Check Your Status |
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