Asher - Anatech Barrel SCE600 - Status: Available

Current Status: Available
Training: View Topics/Sessions
Use Rates:
- External Academic & Government: $67.50/Hour
- External Affiliated Commercial/Industrial: $67.50/Hour
- External Commercial/Industrial: $90.00/Hour
- External International Academic: $90.00/Hour
- Internal Standard: $45.00/Hour
Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
Building: NANO (0070)
Room: Cleanroom, Dry Etch (162)
In Cleanroom: Yes
Main Contact: David Hays

Uses an oxygen plasma for stripping photoresist, descum, surface cleaning, and surface treatment. Can process up to 25, four inch wafers at one time. Max power is 600W.

Plasma Ashing wiki link
Microfabrication wiki link

NOTE: The training only takes 10-15 mins. For training, please select standard training and once it has cleared PI approval, contact a NRF Staff member that is in the cleanroom 8-5 Mon-Fri and they will provide this.

Capabilities Training Prerequisites Calendar Contacts Docs

To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)