Open House 2025 Weekly Update

Sputter Deposition, KJL CMS-18 Multi-Source - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $76.50/Hour
    • External Affiliated Commercial/Industrial: $76.50/Hour
    • External Commercial/Industrial: $102.00/Hour
    • External International Academic: $102.00/Hour
    • Internal Standard: $51.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
 Kurt J. Lesker Multi-Source RF and DC Sputter System.

Sputter Deposition wiki link
Microfabrication wiki link
Capabilities Training Prerequisites Calendar Contacts Docs
Title
4" wafer holder temperature calibrationDownload
Equipment ImageDownload
Sputter Consumables SurchargeDownload
Sputter Deposition, KJL CMS-18 Multi-Source SOPDownload
Standard holder temperature calibrationDownload

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