RTA, SSI Solaris 150 - Status: Down
  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Device Assembly & Processing (122)
  • In Cleanroom: No
  • Main Contact: Andres Trucco
 Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Capabilities Training Prerequisites Calendar Contacts Docs
Training TopicDescriptionRatesApprox Session Length (hrs)
RTA Solaris 150 TrainingStandard Rate: $49.00/Complete User Training1
StartEndAvailabilityLocation
Wed, Oct. 30, 2024 9:00 AMWed, Oct. 30, 2024 10:00 AM1 Seats out of 1NRFSign Up
Wed, Nov. 27, 2024 9:00 AMWed, Nov. 27, 2024 10:00 AM1 Seats out of 1NRFSign Up

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