RTA, SSI Solaris 150 - Status: Available
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Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.
Rapid Thermal Processing wiki link Microfabrication wiki link |
Use Prerequisites
Prerequisite | Description | Status |
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Computer Access | Requires computer access be setup | Check Your Status |
Funding Source | Requires permission to an active funding source | Check Your Status |
Work Plan | Requires a work plan be approved by PI and staff | Check Your Status |
Agreement Form | Requires completed agreement form for equipment usage | Check Your Status |
NRF Safety Training | Requires completion of safety training | Check Your Status |
NRF Building Access | Requires issue of an id badge and entry badge and/or access level to be set. | Check Your Status |
Equipment Training | Requires completion of equipment training | Check Your Status |
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