RTA, SSI Solaris 150 - Status: Down

  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Device Assembly & Processing (122)
  • In Cleanroom: No
  • Main Contact: Andres Trucco
Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Samples size is up to 150mm wafers.

Rapid Thermal Processing wiki link
Microfabrication wiki link

To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)

Calendar ICS Path

An active Gatorlink login is required to create a new reservation.