Litho Process Headway E-Beam Bay & Hot Plate/Oven - Status: Down

Current Status: Down
Training: View Topics/Sessions
Use Rates:
- External Academic & Government: $49.50/Hour
- External Affiliated Commercial/Industrial: $49.50/Hour
- External Commercial/Industrial: $66.00/Hour
- External International Academic: $66.00/Hour
- Internal Standard: $33.00/Hour
Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
Building: NANO (0070)
Room: Cleanroom, E Beam (161)
In Cleanroom: Yes
Main Contact: David Hays

SU8 and other non-standard resist designated spinner.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki link

Training Topic	Description	Rates	Approx Session Length (hrs)
Spin Coater Training		Standard Rate: $61.00/Complete User Training	2

Start	End	Availability	Location	Options
Wed, Nov. 5, 2025 9:00 AM	Wed, Nov. 5, 2025 11:30 AM	1 Seats out of 1	NRF	Sign Up
Thu, Nov. 6, 2025 1:30 PM	Thu, Nov. 6, 2025 4:00 PM	1 Seats out of 1	NRF	Sign Up
Wed, Nov. 19, 2025 9:00 AM	Wed, Nov. 19, 2025 11:30 AM	1 Seats out of 1	NRF	Sign Up
Wed, Dec. 3, 2025 9:00 AM	Wed, Dec. 3, 2025 11:30 AM	1 Seats out of 1	NRF	Sign Up
Thu, Dec. 4, 2025 1:30 PM	Thu, Dec. 4, 2025 4:00 PM	1 Seats out of 1	NRF	Sign Up
Wed, Dec. 17, 2025 9:00 AM	Wed, Dec. 17, 2025 11:30 AM	1 Seats out of 1	NRF	Sign Up
Wed, Dec. 31, 2025 9:00 AM	Wed, Dec. 31, 2025 11:30 AM	1 Seats out of 1	NRF	Sign Up
Thu, Jan. 1, 2026 1:30 PM	Thu, Jan. 1, 2026 4:00 PM	1 Seats out of 1	NRF	Sign Up

To request a training session at a custom date & time, please click an option below.

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