Litho Process Suss Delta 80 & Hot Plate/Oven - Status: Available
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Description: The Litho Bay Suss Delta 80 Spinner automatically applies AZ1512 and AZ9260 photoresist. It has the unique capability of applying photoresist in a solvent rich environment; improving uniformity and extending the allowable thickness range for a single photoresist type. Other materials may be used ONLY by special request to NRF Staff.
Sample sizes: fragments <4", 4" max for round substrates, 4" max for square substrates.
Pump 1 resist = AZ 1512 photoresist
Pump 2 resist = AZ 9260 photoresist
Autosyringe dispense = available for dispensing other materials (email requests to NRF Staff)
The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens. Spin Coating wiki link Photolithography wiki link Photoresist wiki link Microfabrication wiki link |
Use Prerequisites
| Prerequisite | Description | Status |
|---|---|---|
| Computer Access | Requires computer access be setup | Check Your Status |
| Funding Source | Requires permission to an active funding source | Check Your Status |
| Work Plan | Requires a work plan be approved by PI and staff | Check Your Status |
| Agreement Form | Requires completed agreement form for equipment usage | Check Your Status |
| NRF Safety Training | Requires completion of safety training | Check Your Status |
| NRF Building Access | Requires issue of an id badge and entry badge and/or access level to be set. | Check Your Status |
| Equipment Training | Requires completion of equipment training | Check Your Status |
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