Profilometer, Dektak XT - Status: Available

Current Status: Available
Training: View Topics/Sessions
Use Rates:
Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
Building: NANO (0070)
Room: Cleanroom, Dry Etch (162)
In Cleanroom: Yes
Main Contact: nrfinfo@mail.ufl.edu

The Dektak XT is a highly sensitive stylus profilometer. A diamond-tipped stylus is moved laterally across the surface while in contact and measures deflections of the tip. It can be used to measure step heights (film thickness), surface roughness, waviness and stress. The vertical measuring range is 1mm and can perform a line scan as long as 55mm. Vertical resolution is 1A max, using the 6.55um range and the stylus force can be varied from 1mg to 15mg. The Dektak can accommodate wafers up to 150mm and features a motorized X-Y stage.

Profilometer wiki link

Capabilities Training Prerequisites Calendar Contacts Docs

Title
Dektak XT	Download
Dektak XT SOP	Download

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