RTA, Steag 100CS RTP - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Training TopicDescriptionRatesApprox Session Length (hrs)
RTA Steag TrainingStandard Rate: $29.00/Complete User Training1

No Scheduled Training Sessions are Currently Available. Please see the option(s) below.

To request a training session at a custom date & time, please click an option below.

Request and Sign Up for RTA Steag Training | Request and Sign Up for Priority RTA Steag Training

An active Gatorlink login is required to create a new reservation.