RTA, Steag 100CS RTP - Status: Down
  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $70.30/Hour
    • External Affiliated Commercial/Industrial: $70.30/Hour
    • External Commercial/Industrial: $93.70/Hour
    • External International Academic: $93.70/Hour
    • Internal Standard: $46.90/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.

Rapid Thermal Processing wiki link
Microfabrication wiki link
Capabilities Training Prerequisites Calendar Contacts Docs
Contact LevelNameEmail
1Lewis, Billwalewis@ufl.edu
2Hays, Daviddhays@nimet.ufl.edu

General Contact: nrfinfo@mail.ufl.edu

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