RTA, Steag 100CS RTP - Status: Available
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Description: Atmospheric Rapid thermal anneal to 1050°C. Gases available are: N2, H2N2, O2. Process time is limited to 10 minutes.
Rapid Thermal Processing wiki link Microfabrication wiki link |
Contact Level | Name | |
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1 | Lewis, Bill | walewis@ufl.edu |
2 | Hays, David | dhays@nimet.ufl.edu |
General Contact: nrfinfo@mail.ufl.edu
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