Litho Process Laurell Litho Bay & Hot Plate/Oven - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $49.50/Hour
    • External Affiliated Commercial/Industrial: $49.50/Hour
    • External Commercial/Industrial: $66.00/Hour
    • External International Academic: $66.00/Hour
    • Internal Standard: $33.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Photolithography (165)
  • In Cleanroom: Yes
  • Main Contact: David Hays
 Description: The Litho Bay Laurell Spinner is used to manually apply SU8 and LOR ONLY. NO OTHER MATERIALS MAY BE USED.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki link
Capabilities Training Prerequisites Calendar Contacts Docs
Title
Equipment ImageDownload
Litho Process, Laurell E-Beam & Litho Bay & Hot Plate/Oven SOPDownload
NRF Lithography Processes SOPDownload

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