Nanoscale Research Facility

Nanoscale Research Facility

Alerts

Posted on Tue, Oct 4, 2011 at 3:22 PM

Trion etcher now available

The new Trion etcher is now available for training and use. The tool has been added to the training calendar. Recipes have been developed for Si (isotropic and anisotropic), SiO2, Si3N4, Al, and polymers to start.

Posted on Tue, Sep 13, 2011 at 3:44 PM

ALERT!!!! NRF User Guide Updated

Please be sure to read the new User Guide. A lot of important information has been added. Test addition

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